INTERFERENCE MICROSCOPE-NANOPROFILOMETER
MNP

DESCRIPTION


   Microscope MNP operates in two modes:
     The nano-measurement mode is designed for measuring the height of the relief surfaces of the high purity grade, released less than 0.1 nm in the range of 0 to 50 microns.
     The micro-measurement mode is designed for measuring the relief of "rough" surfaces in a range from 0 to 10 mm with a resolution of less than 0.1 microns.

SYSTEM CHARACTERISTICS


Measurement of nanorelief
 

height measurement range

from 0 to 50 microns

resolution in height

0.1 nm

transverse resolution

1.7 / 0.8 / 0.3 microns

measurement area

2.41.8 /1.10.8/0.50.34 mm2

Measurement of microrelief
 

height measurement range

from 0 to 10 mm

resolution in height

0.1 microns

transverse resolution

1.7 / 0.8 / 0.3 microns

measurement area

2.41.8 /1.10.8/0.50.34 mm2

KEY FEATURES


  • compactness;
  • high performance;
  • resistance to external vibrations;
  • a high degree of the measurement process automation;
  • developed software user interface;
  • high-quality graphical user interface for work with 3D-representations of multidimensional measurement results;
  • wide opportunities of customization for different types of microscope morphology of the surface being measured;
  • the ability to work in a two-wave mode;
  • automated positioning of the measured object in three dimensions;
  • the ability to measure large areas by linking the results of separate measurements;
  • the unique system of storage and systematization of measurement results.
  • Workplace

    PRINCIPLE OF OPERATION


    The principle of operation is based on the use of the interference of partially coherent light. The measurement is performed by scanning the surface topography measured by height. In the process of measurement there are used both measurement of the amplitude and phase information of the autocorrelation function of the interfering light. This principle allows to make measurements in a wide range of measuring and solve most of the problems, both in production and in research.

    GALERY


    Micromeasurement

    The structure of the polymer

    Trace of a fountain pen on paper

    Silica layer on the glass

    Nanomeasurnement

    Strip on the semiconductor

    Structure on a semiconductor

    A metal layer on silicon


    Russkaya, 41, Novosibirsk, Russia, 630058
    Director of Institute, Prof. Yu. V. Chugui.
    Tel. +7 (383) 306-58-95,306-62-08 Fax: +7 (383) 306-58-69
    e-mail: chugui@tdisie.nsc.ru
    http://www.tdisie.nsc.ru